Abstract:To address the problems of large control precision error and poor stability of the wafer motion platform of chip sortersunder complex working conditions,a hybrid control strategy combining multi-strategy Improved Black-winged Kite Algorithm(IBKA)and Model Predictive Control(MPC),namely IBKA-MPC,is proposed. Finally,experimental simulations are carriedout via MATLAB/Simulink. The results show that the proposed IBKA-MPC controller exhibits superior control accuracy and robustness in wafer stage trajectory tracking.